JPH0317177B2 - - Google Patents

Info

Publication number
JPH0317177B2
JPH0317177B2 JP57052552A JP5255282A JPH0317177B2 JP H0317177 B2 JPH0317177 B2 JP H0317177B2 JP 57052552 A JP57052552 A JP 57052552A JP 5255282 A JP5255282 A JP 5255282A JP H0317177 B2 JPH0317177 B2 JP H0317177B2
Authority
JP
Japan
Prior art keywords
ion beam
emitter
ion
electrode
extraction electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57052552A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58169855A (ja
Inventor
Ryuzo Aihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP57052552A priority Critical patent/JPS58169855A/ja
Publication of JPS58169855A publication Critical patent/JPS58169855A/ja
Publication of JPH0317177B2 publication Critical patent/JPH0317177B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Electron Sources, Ion Sources (AREA)
JP57052552A 1982-03-31 1982-03-31 イオン銃 Granted JPS58169855A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57052552A JPS58169855A (ja) 1982-03-31 1982-03-31 イオン銃

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57052552A JPS58169855A (ja) 1982-03-31 1982-03-31 イオン銃

Publications (2)

Publication Number Publication Date
JPS58169855A JPS58169855A (ja) 1983-10-06
JPH0317177B2 true JPH0317177B2 (en]) 1991-03-07

Family

ID=12917964

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57052552A Granted JPS58169855A (ja) 1982-03-31 1982-03-31 イオン銃

Country Status (1)

Country Link
JP (1) JPS58169855A (en])

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT960799B (it) * 1971-08-16 1973-11-30 American Optical Corp Microscopio a scansione ad emissione di campo a bassa tensione
JPS54118066U (en]) * 1978-02-08 1979-08-18

Also Published As

Publication number Publication date
JPS58169855A (ja) 1983-10-06

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